Semiconductor Equipment: Lam Systems Parts List For Sale
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| Item
| Part No.
| Description
| Qty
|
| 1
| 688-090733-001
| Filter, RF Lowpass
| 1
|
| 2
| 713-000032-001
| Bushing, Large Polyemide
| 9
|
| 3
| 713-011579-001
| Housing Plunger
| 6
|
| 4
| 713-011980-001
| Housing Plunger
| 6
|
| 5
| 713-013486-001
| Pan, Drip Nozzle
| 1
|
| 6
| 713-013488-001
| Block, Nozzle Mtg. L/H
| 1
|
| 7
| 713-013489-001
| Block, Nozzle Mtg. R/H
| 1
|
| 8
| 713-021725-001
| Bumer, Chemraz
| 5
|
| 9
| 714-002421-001
| Shim for Reactor Chamber
| 14
|
| 10
| 714-008777-001
| Baffle Scrn, Upper
| 2
|
| 11
| 714-013487-001
| Bracket, Mtg.
| 2
|
| 12
| 714-220541-001
| Box Flowmeter AMP Hot & Cold
| 1
|
| 13
| 715-001408-001
| Electrode, Hard Anodized
| 1
|
| 14
| 715-002542-001
| Rack, Guide Gate, LKG
| 4
|
| 15
| 715-006856-001
| Mt Ball Screw
| 6
|
| 16
| 715-008067-001
| Gate, Hard Anodized
| 2
|
| 17
| 715-009306-006
| Focus Ring
| 1
|
| 18
| 715-011035-001
| Plate, Lower End, Reaction Chmbr
| 1
|
| 19
| 715-011229-001
| Plate, Seal, Exit Load Lock
| 1
|
| 20
| 715-011492-008
| Holder,Wafer, 8" Stripper
| 1
|
| 21
| 715-011532-006
| Plate, Upper Seal, 6" Elect
| 1
|
| 22
| 715-011665-006
| Lower Elec Cap, 6" w/ Vent Grooved
| 1
|
| 23
| 715-011673-105
| Cap, Lower Elect 5" Domed
| 1
|
| 24
| 715-011746-156B
| Plate, W/C, 5", 0.020" Dome RDCD
| 4
|
| 25
| 715-011901-005
| Lwr Baffle, Domed, 5" Electrode
| 1
|
| 26
| 715-011985-006
| Cap, Lower Electrode, (Domed .025")
| 10
|
| 27
| 715-012101-004
| Holder, Wafer, 4", Arm, Exit
| 1
|
| 28
| 715-012101-006
| Holder, Wafer, 6", Arm, Exit
| 2
|
| 29
| 715-012101-008
| Holder, Wfr Arm, Exit
| 1
|
| 30
| 715-012165-008
| Holder, Wfr 8" Tght Pocket
| 1
|
| 31
| 715-012233-002
| Gate (Hard Anodized) Inner Gat
| 1
|
| 32
| 715-013477-001
| Plate, MTG
| 1
|
| 33
| 715-021494-001
| Hinge, Process Chamber
| 2
|
| 34
| 715-028626-001
| Plate, Upper Baffle, 6"
| 1
|
| 35
| 715-028699-013
| Shower Head
| 1
|
| 36
| 715-032423-008
| Cover, Bowl, Rinse
| 1
|
| 37
| 716-006446-001
| Diffuser Cathode
| 1
|
| 38
| 716-011563-151
| Domed, W/C 1.5mm Cover w/ Pins
| 1
|
| 39
| 716-011563-152
| 5" Domed, W/C (1.5mm Cover w/ Pins)
| 1
|
| 40
| 716-011572-001
| Clamp, Retainer, 1/4 Turn
| 3
|
| 41
| 716-028668-251
| Plate, TP Wfr Clamp DMD Shadow
| 1
|
| 42
| 716-028668-281
| Plate, Lower Wfr Clamp, 8" Shad
| 1
|
| 43
| 718-092326-081
|
| 1
|
| 44
| 718-092326-082
| Assy, ESC DG#LA8PPF
| 1
|
| 45
| 720-000930-008
| SCR, SCH Cap, 6-32
| 4
|
| 46
| 720-000940-005
| SCR, SCH Cap, 8-32 2AX5
| 2
|
| 47
| 720-000940-005
| SCR, SCH Cap, 8-32
| 4
|
| 48
| 721-000936-001
| Wshr, FLT, #6
| 2
|
| 49
| 721-000936-002
| Wshr, LK, #6
| 2
|
| 50
| 721-000946-001
| Wshr, FLT, #8
| 4
|
| 51
| 721-000946-002
| Wshr, LK, #8
| 4
|
| 52
| 754-091624-001
| Spring, Compression
| 6
|
| 53
| 765-008372-001
| Encoder Shaft
| 2
|
| 54
| 766-009593-002
| Reg, Press, Teflon
| 1
|
| 55
| 766-090814-001
| Actuator Assy, N.C.
| 1
|
| 56
| 766-090815-001
| Actuator Assy, N.O.
| 32
|
| 57
| 766-091250-006
| Valve, Nupro, 1/4" Swagelock
| 2
|
| 58
| 768-006970-001
| Switch, Vac 724 Torr
| 2
|
| 59
| 768-091910-001
| Switch, Vac 5 Torr Gauge
| 2
|
| 60
| 770-007494-001
| Cyl Arm Dr 3/4 Bore ISTR
| 1
|
| 61
| 770-009005-001
| Cyl, 1-5/8 Bore X 2-3/4 STR
| 1
|
| 62
| 771-090453-001
| Convectron Tube, 1/4" VCR
| 1
|
| 63
| 771-092520-002
| Flwmtr, DI, Tntlm FLT, U82M1/M
| 2
|
| 64
| 796-007432-101
| Generator, Vacuum
| 2
|
| 65
| 796-009933-001
| Conn, Male, 7/16-20 VCR
| 1
|
| 66
| 796-090059-001
| Ftg, Conn, Male, ULTR, .25TB
| 1
|
| 67
| 796-092914-001
| Ftg, 1/4" Nom Ultra Torr
| 52
|
| 68
| 810-002896-001
| Assy, PCB, Conv Tube Interface
| 1
|
| 69
| 839-014432-101
| Weldmt, Tee Filter
| 5
|
| 70
| 839-021878-001
| Base, Elect, Air Cooled ISO
| 1
|
| 71
| 839-024377-100
| Weldmt, Downstream Sup - UQT
| 1
|
| 72
| 853-004197-001
| Assy, Delay Valve
| 1
|
| 73
| 853-011141-003
| Assy, Brake, RF Gap
| 1
|
| 74
| 853-012095-006
| Assy, Exit Arm 6" WT
| 1
|
| 75
| 853-017631-001
| Assy, Vac Sw 714.5 Torr
| 1
|
| 76
| 853-017643-001
| Assy, Manometer
| 3
|
| 77
| 853-021635-003
| Assy, Manometer LL Stripper
| 1
|
| 78
| 853-031685-002
| Assy, Upper Match
| 1
|
| 79
| 856-010345-006
| Kit, Ret Wafer Kit, 6" ISO
| 1
|
| 80
| 856-025067-161
| Kit, Retrofit, Esc 8", 4720
| 1
|
| 81
| 920-090916-003
| Conn, Blkhead
| 2
|
| 82
| 921-009590-003
| Adaptor, 1/4T x 1/8NPT
| 2
|
| 83
| 955-009576-003
| Teflon Tube, 0.250 O.D. x 0.187 I.D.
| 1
|
R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
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