Semiconductor Equipment: Vacuum Systems, Pumps, Blower, and Power Supplies
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BUY - SELL - LEASE - TRADE - SERVICE - PROCESS
The following are notes from the list provider:
Equipment Sales
- We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
Equipment Purchasing/Trade
- We will also buy your equipment, and take your systems in trade.
Equipment Spare Parts
- We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
Equipment Repair/Service
- We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
Plasma Processing
- We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.
Note:
- All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.
Vacuum Systems
| Item
| Qty
| Description
|
| 1
| 1 Ea
| CPA Model 9900 DC Sputter Deposition System, w/ 4 ea ERA 5 KW DC sputtering power supplies, 2 ea CTI 8 and 1 ea CTI 10 cryo pumps, w/ pumps and chillers.
|
| 2
| 1 Ea
| GSI R&D deposition system, for AMSi, amnual valving, Sierra mass flow controllers, MKS baratron controller, GP 307 vacuum gauge, 2 ea Balzers Model TPU 330 turbo pumps/TCP 310 controllers, ENI ACG-3 RF P/S, Leybold pump/blower package.
|
| 3
| 1 Ea
| Leybold Model VZK A550 sputtering machine, w/ Huttinger Model IS 6 10KW RF Power supply, spare RF Generator.
|
| 4
| 1 Ea
| Innotech sputterer customized: 486 industrial computer tied to PLC, CTI 8 cryo w/ compressor, RF Services automatch networks w/ controllers, approx 28" dia SS chamber, RGA port, Henry 10KW RF Power Supply, Advanced Energy Model RFX 1250 P/S, spare RF Generator.
|
| 5
| 1 Ea
| Leybold Heraeus Model Ultratest F Leak Detector, automatic operation, diffusion pump.
|
| 6
| 1 Ea
| NRC 3317 Sputtering System, MRC S-3007 RF P/S, 1.25 KW, 6" target w/ sputter etch station, manual valving, VHS-6" DP with Welch 1397 mechanical pump.
|
Vacuum Pumps and Blowers
| Item
| Qty
| Manufacturer
| Model
| Capacity, CFM/LPM
|
| 1
| 2
| Alcatel
| 2030C
| 17.7/500
|
| 2
| 1
| Alcatel
| 2033C
| 27/765
|
| 3
| 5
| Alcatel
| ZT2063C
| 50/1420
|
| 4
| 1
| Edwards
| E2M1
| N/A
|
| 5
| 2
| Edwards
| E2M40
| 30/845
|
| 6
| 1
| Edwards
| E2M80
| 57/1613
|
| 7
| 1
| Edwards
| EH250
| 190/5367
|
| 8
| 1
| Leybold
| D2
| 2.2/62
|
| 9
| 1
| Leybold
| D8
| 7.0/198
|
| 10
| 4
| Leybold
| D16
| 14.1/400
|
| 11
| 2
| Leybold
| D16BCS
| 11.6/328
|
| 12
| 1
| Leybold
| D30AC
| 26.8/760
|
| 13
| 2
| Leybold
| D30AC, Fomblin Prep
| 26.8/760
|
| 14
| 1
| Leybold
| D40BCS
| 28.3/920
|
| 15
| 2
| Leybold
| S60
| N/A
|
| 16
| 2
| Leybold
| D60
| 36.7/1039
|
| 17
| 2
| Leybold
| D90AC
| 55/1556
|
Vacuum Pump/Blower Packages
| Item
| Qty
| Manufacturer
| Model
| Capacity, CFM/LPM
|
| 1
| 3
| Edwards
| E2M40/EH250, New
| 220/6196
|
| 2
| 1
| Leybold
| D40BCS/Blower
| 28.3/920
|
| 3
| 1
| Edwards
| Edwards/EH 1200
| 780 CFM
|
| 4
| 1
| Leybold
| D30AC/WA250
| 179 CFM
|
RF Power Supplies
| Item
| Manufacturer
| Model
| Capacity, Watts
| Frequence
|
| 1
| Advanced Energy
| PE-1000SG
| 1250
| 25-100 KHz
|
| 2
| Advanced Energy
| RFX1250
| 1250
| 13.56 MHz
|
| 3
| Advanced Energy
| PDW2200
| 2200
| N/A
|
| 4
| Advanced Energy
| RFG1250
| N/A
| N/A
|
| 5
| Branson
| PM 119
| 500
| 13.56 MHz
|
| 6
| Branson
| PM 118
| 500
| 13.56 MHz
|
| 7
| Branson
| PM 112
| 1500
| 13.56 MHz
|
| 8
| Branson
| PM 122
| 1500
| 13.56 MHz
|
| 9
| Branson
| PM 129
| 500
| 13.56 MHz
|
| 10
| Branson
| PM 332
| 1000
| 13.56 MHz
|
| 11
| Comdel
| CPS-1001
| 1000
| 13.56 MHz
|
| 12
| ENI
| HF1
| 2000
| 13.56 MHz
|
| 13
| ENI
| AGC-10T
| 1000
| 13.56 MHz
|
| 14
| ENI
| OEM-6
| 1000
| 13.56 MHz
|
| 15
| ENI
| OEM-12
| 1250
| 13.56 MHz
|
| 16
| ENI
| Matchworks 25D
| 3000W max
| 13.56 MHz
|
Matching Network
| Item
| Manufacturer
| Model
| Capacity, Watts
| Frequence
|
| 1
| LFE
| SA 40C
| 500W
| 13.56 MHz
|
| 2
| Plasma Therm
| HFS3000D
| 3000W
| 13.56 MHz
|
| 3
| Plasma Therm
| HFS10000
| 10000W
| 13.56 MHz
|
| 4
| RF Plasma Prod.
| RF 50S
| 5000W
| 13.56 MHz
|
| 5
| RF Plasma Prod
| HFS500E
| 500W
| 13.56 MHz
|
| 6
| Tegal
| N/A
| 300W
| 13.56 MHz
|
| 7
| Bird
| Dummy Load, 3 Ea
| 1500W
| N/A
|
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Tel: (408)259-1900 Fax: (408)259-1990
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Email: webmaster@semicontechpro.8m.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: R&D Vacuum Systems and More Semiconductor Equipment | C12: Semiconductor and High Tech Equipment |
C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online
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