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Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Semiconductor Equipment List
| Item No.
| Equipment
| Model
| Vendor
| Asset No.
| S/L No.
| Date Manufactured
| Qty
|
| 1
| A.G. V (2AG01)
| Hirata
| Hyundai Robot
| D9Z931136
| 200151
| 19931231
| 1
|
| 2
| Auto Loader (2AL22)
| 6401
| Western Equipment
| D9Z930114
| 6401-168
| 19930420
| 1
|
| 3
| Auto Loader (2AL30)
| NOVX2100
| NOVX
| D9Z930912
| 7934
| 19931201
| 1
|
| 4
| Auto Loader
| NWL641
| Nikon
| D9Z930056
| 7938
| 19930331
| 1
|
| 5
| Auto Loader
| NWL641
| Nikon
| D9Z930086
| 200105
| 19930331
| 1
|
| 6
| Auto Loader (2AL11)
| NWL641
| Nikon
| D9Z930081
| 200143
| 19930331
| 1
|
| 7
| Auto Loader (3AL04)
| NWL641
| Nikon
| D9Z930087
| 200127
| 19930331
| 1
|
| 8
| Auto Loader (2AL15)
| Ultrastation-3
| Irvine
| D9Z931074
| 7936
| 19931125
| 1
|
| 9
| Auto Loader (2AL26)
| Ultrastation-3
| Irvine
| D9Z931072
| 7930
| 19931125
| 1
|
| 10
| Auto Loader
| |
Irvine
| D9Z950654
| 7980
| 19950610
| 1
|
| 11
| Auto Loader
| |
Irvine
| D9Z950655
| 7980
| 19950610
| 1
|
| 12
| Back Grinder (2BG01)
| DFG-83H/6
| Disco
| D9Z850908
| GA0330
| 19860106
| 1
|
| 13
| Back Grinder (3BG01)
| DFG-83H/6
| Disco
| D9Z880406
| GA0396
| 19890131
| 1
|
| 14
| Catch Cup Cleaner
| 1840*1100*2100
| Union Industry
| D9Z960502
| |
19960905
| 1
|
| 15
| Catch Cup Cleaner
| |
Union Industry
| D9Z960234
| |
19960522
| 1
|
| 16
| CCD Monitor System
| SC-410XD
| Dukwoo Electronics
| D9Z90113
| |
19950424
| 1
|
| 17
| CD SEM (2CS06)
| S-6280
| Hitachi
| D9A940372
| 7515-01
| 19940701
| 1
|
| 18
| CD SEM (2CS02)
| S-6600
| Hitachi
| D9Z920226
| 04-01
| 19921201
| 1
|
| 19
| CD SEM (2CS91)
| S-6700
| Hitachi
| D9Z930247
| 01-08
| 19930601
| 1
|
| 20
| Chiller
| HX-750
| Neslab
| D9Z910644
| 89GM2300-1
| 19911130
| 1
|
| 21
| Chiller
| HX-750
| Neslab
| D9Z910645
| 89GM2300-2
| 19911130
| 1
|
| 22
| Clean Room/42
| |
|
D9Y980032
| |
19960506
| 1
|
| 23
| CVD (2EX2A, 2B)
| ISR-200
| Metron
| D9Z920325
| 0902-0085-0192
| 19930601
| 1
|
| 24
| CVD (2SIO3)
| 8710
| Genus
| D9Z890083
| 191
| 19890429
| 1
|
| 25
| CVD (2SI41)
| 8710LP
| Genus
| D9Z920559
| 330
| 19921201
| 1
|
| 26
| CVD (2WJ03)
| WJ-999R
| W.J.
| D9Z930233
| 4849
| 19930601
| 1
|
| 27
| Ellipsometer (2EQ06)
| SD2000
| Plasmos
| D9Z930300
| 50710793
| 19931125
| 1
|
| 28
| Ellipsometer (2EQ92)
| Auto ELIII
| Rudolph
| D9Z930090
| 70250
| 19930601
| 1
|
| 29
| Ellipsometer (2EQ94)
| Auto ELIII
| Rudolph
| D9Z930088
| 70264
| 19930601
| 1
|
| 30
| Etcher (AP32)
| P-5000
| AMAT
| D9Z910894
| 5200
| 19911201
| 1
|
| 31
| Etcher (2EN33)
| R-490
| LRC
| D9Z850876
| 1292
| 19860106
| 1
|
| 32
| Etcher (2ER16)
| R-4426
| LRC
| D9Z931093
| 2732
| 19931230
| 1
|
| 33
| Etcher (2ER13)
| R-4400
| LRC
| D9Z920335
| 2406
| 19921201
| 1
|
| 34
| Etcher (2ER14)
| R-4400
| LRC
| D9Z920336
| 2407
| 19921201
| 1
|
| 35
| Etcher (2ER11)
| R-4400
| LRC
| D9Z910502
| 2309
| 19911231
| 1
|
| 36
| Etcher (2ER95)
| R-4420
| LRC
| D9Z930276
| 2532
| 19930601
| 1
|
| 37
| Etcher (2EM58)
| R-4620
| LRC
| D9L940529
| 2915
| 19941115
| 1
|
| 38
| Etcher (2EM54)
| R-4620
| LRC
| D9Z930274
| 2554
| 19930601
| 1
|
| 39
| Etcher (2EM55)
| R-4620
| LRC
| D9Z930273
| 2547
| 19930601
| 1
|
| 40
| Etcher (TP31)
| TOP-9400
| LRC
| D9Z930117
| 4011
| 19930420
| 1
|
| 41
| Etcher (2ET61)
| TE-5000
| TEL
| D9Z910919
| 5K-1181
| 19911201
| 1
|
| 42
| Etcher (2ET37)
| TE-5000
| TEL
| D9Z920268
| 5K-1208
| 19911201
| 1
|
| 43
| Etcher (2ET62)
| TE-5000
| TEL
| D9Z920267
| 5K-1207
| 19911201
| 1
|
| 44
| Etcher (2ET63)
| TE-5000
| TEL
| D9Z930288
| 5K2290
| 19930601
| 1
|
| 45
| Etcher (2ET64)
| TE-5000
| TEL
| D9Z930284
| 5K2289
| 19930601
| 1
|
| 46
| Etcher (2ET91)
| TE-5000
| TEL
| D9Z930237
| 5K3317
| 19930601
| 1
|
| 47
| Etcher (2ET92)
| TE-5000
| TEL
| D9Z930238
| 5K3318
| 19930601
| 1
|
| 48
| Etcher (2ET93)
| TE-5000
| TEL
| D9Z930240
| 5K3319
| 19930601
| 1
|
| 49
| Etcher (2ET94)
| TE-5000
| TEL
| D9Z930239
| 5K3320
| 19930601
| 1
|
| 50
| Etcher (2ET32)
| TE-480
| TEL
| D9Z911271
| 490404
| 19911201
| 1
|
| 51
| Etcher (TC44)
| TE-480 (HGC)
| TEL
| D9Z920298
| 490659
| 19911201
| 1
|
| 52
| Etcher (2ET34)
| TE-580
| TEL
| D9Z911129
| 590407
| 19911201
| 1
|
| 53
| Etcher (2ET35)
| TE-580
| TEL
| D9Z911128
| 590406
| 19911201
| 1
|
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C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: R&D Vacuum Systems and More Semiconductor Equipment | C12: Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online
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